Patent Assignment
Reel/Frame 024104/0136
Assignment of Assignor's Interest
Recorded: 2010-03-18
Received: 2010-03-18
Pages: 4
Assignor
TANAKA, TOSHIHIKO
Executed: 2010-01-21
Assignee
RENESAS TECHNOLOGY CORP.
6-2, OTEMACHI 2-CHOME, CHIYODA-KU,, TOKYO, JPX, 100-0004, JAPAN
Covered Property
(1)
Method and Apparatus for Manufacturing Semiconductor Device and Resist Material
Application:
12/678,977 →