Patent Application
Utility
PCT National Stage
App. No. 12/678,977
· Confirmation No. 2463
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND RESIST MATERIAL
Inventor:
Toshihiko Tanaka
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-03-14 | ABN |
Abandonment | 2 | View | |
| 2013-08-29 | CTFR |
Final Rejection | 14 | View | |
| 2013-08-29 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2013-08-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2013-07-29 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2013-07-29 | CLM |
Claims | 3 | View | |
| 2013-07-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2013-07-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-07-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-07-29 | XT/ |
Extension of Time | 1 | View | |
| 2013-07-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-03-28 | CTNF |
Non-Final Rejection | 10 | View | |
| 2013-03-28 | 892 |
List of references cited by examiner | 1 | View | |
| 2013-03-28 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2013-03-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2013-03-28 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2013-03-28 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2013-03-28 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2013-03-28 | FOR |
Foreign Reference | 1 | View | |
| 2013-01-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2013-01-02 | FOR |
Foreign Reference | 17 | View | |
| 2013-01-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-01-02 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2012-09-20 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2012-09-20 | XT/ |
Extension of Time | 1 | View | |
| 2012-09-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-09-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2012-09-20 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2012-09-20 | CLM |
Claims | 3 | View | |
| 2012-09-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 9 | View | |
| 2012-09-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-06-26 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2012-06-26 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2012-06-26 | FOR |
Foreign Reference | 6 | View | |
| 2012-06-26 | FOR |
Foreign Reference | 12 | View | |
| 2012-06-26 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-06-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-06-04 | CTFR |
Final Rejection | 8 | View | |
| 2012-06-04 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-06-04 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2012-06-04 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-03-15 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-03-15 | CLM |
Claims | 2 | View | |
| 2012-03-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2012-03-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-03-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-12-22 | CTNF |
Non-Final Rejection | 6 | View | |
| 2011-12-22 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-12-22 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2011-12-22 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2011-12-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-08-19 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2010-05-12 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2010-05-12 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-03-18 | TRNA |
Transmittal of New Application | 2 | View | |
| 2010-03-18 | 371P |
Documents submitted with 371 (National Stage) Applications | 2 | View | |
| 2010-03-18 | A.PE |
Preliminary Amendment | 1 | View | |
| 2010-03-18 | SPEC |
Specification | 1 | View | |
| 2010-03-18 | CLM |
Claims | 3 | View | |
| 2010-03-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2010-03-18 | SPEC |
Specification | 29 | View | |
| 2010-03-18 | CLM |
Claims | 3 | View | |
| 2010-03-18 | ABST |
Abstract | 1 | View | |
| 2010-03-18 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2010-03-18 | OATH |
Oath or Declaration filed | 3 | View | |
| 2010-03-18 | 136A |
Authorization for Extension of Time all replies | 2 | View | |
| 2010-03-18 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-03-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-03-18 | 371P |
Documents submitted with 371 (National Stage) Applications | 4 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 7 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 8 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 5 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 22 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 15 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 10 | View | |
| 2010-03-18 | FOR |
Foreign Reference | 9 | View | |
| 2010-03-18 | 371P |
Documents submitted with 371 (National Stage) Applications | 13 | View | |
| 2010-03-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-03-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2010-03-18 | FRPR |
Certified Copy of Foreign Priority Application | 20 | View | |
| 2010-03-18 | P.PAMPHLET |
WIPO Publication - Non-English version | 34 | View | |
| 2010-03-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-03-18 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2010-03-18 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Toshihiko Tanaka
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/311
G03F7/38
H10P76/2041
H10D64/01326
Prosecution
- Examiner
- CHACKO DAVIS, DABORAH
- Art Unit
- 1722
- Customer No.
- 20277
- Docket No.
- 067162-0047
- Confirmation No.
- 2463
Foreign Priority
2007-247125
·
2007-09-25
·
JAPAN
Publication
- Pub. No.
- US20100209855A1
- Pub. Date
- 2010-08-19
from
TANAKA, TOSHIHIKO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-03-18
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Quick Facts
- App. No.
- 12/678,977
- Filed
- 2010-03-18
- Pub. No.
- US20100209855A1
- Examiner
- CHACKO DAVIS, DABORAH
- Art Unit
- 1722
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