Patent Assignment
Reel/Frame 024153/0206
Assignment of Assignor's Interest
Recorded: 2010-03-29
Pages: 5
Assignors
CADEE, THEODORUS PETRUS MARIA
Executed: 2010-03-08
GILISSEN, NOUD JAN
Executed: 2010-03-11
COMPEN, RENE THEODORUS PETRUS
Executed: 2010-03-08
KENNON, JAMES
Executed: 2010-03-08
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus, a Method for Removing Material of One or More Protrusions on a Support Surface, and an Article Support System