Patent Assignment
Reel/Frame 024153/0327
Assignment of Assignor's Interest
Recorded: 2010-03-29
Pages: 3
Assignors
HETZLER, JOCHEN
Executed: 2010-03-01
SCHILLKE, FRANK
Executed: 2010-03-19
SCHULTE, STEFAN
Executed: 2010-03-01
FREIMANN, ROLF
Executed: 2010-03-22
DOERBAND, BERND
Executed: 2010-03-02
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element and Method of Calibrating a Measuring Apparatus Comprising a Wave Shaping Structure
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.