Patent Assignment
Reel/Frame 024162/0077
Assignment of Assignor's Interest
Recorded: 2010-03-30
Pages: 3
Assignors
JOHNSON, ERIK N.
Executed: 1999-09-13
GOLDBERG, EDWARD M.
Executed: 1999-09-13
MILLER, LAWRENCE R.
Executed: 1999-09-13
Assignee
KLA-TENCOR
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134-1809
Covered Property
(1)
Method and Apparatus for Inspecting Reticles Implementing Parallel Processing