Patent Assignment
Reel/Frame 024172/0916
Assignment of Assignor's Interest
Recorded: 2010-03-31
Pages: 4
Assignors
AKAE, NAONORI
Executed: 2010-03-16
HIROSE, YOSHIRO
Executed: 2010-03-16
KATO, TOMOHIDE
Executed: 2010-03-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.