Patent Assignment
Reel/Frame 024177/0301
Assignment of Assignor's Interest
Recorded: 2010-04-01
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Automated Process Control Using an Adjusted Metrology Output Signal