Patent Assignment
Reel/Frame 024179/0352
Assignment of Assignor's Interest
Recorded: 2010-04-02
Pages: 4
Assignors
SCHMIDT, BEAT
Executed: 2010-03-15
HEAU, CHRISTOPHE
Executed: 2010-03-15
MAURIN-PERRIER, PHILIPPE
Executed: 2010-03-15
Assignee
H.E.F.
RUE BENOIT FOURNEYRON, ANDREZIEUX BOUTHEON, 42160, FRANCE
Covered Property
(1)
Method of Treating a Surface of at Least One Part by Means of Individual Sources of an Electron Cyclotron Resonance Plasma