Patent Assignment
Reel/Frame 024181/0267
Assignment of Assignor's Interest
Recorded: 2010-04-02
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Examining a Wafer with Regard to a Contamination Limit and Euv Projection Exposure System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.