Patent Assignment
Reel/Frame 024206/0289
Assignment of Assignor's Interest
Recorded: 2010-04-08
Pages: 2
Assignor
DODOC, AURELIAN
Executed: 2010-03-31
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Mirror for the Euv Wavelength Range, Projection Objective for Microlithography Comprising Such a Mirror, and Projection Exposure Apparatus for Microlithography Comprising Such a Projection Objective
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.