Patent Assignment
Reel/Frame 024254/0828
Assignment of Assignor's Interest
Recorded: 2010-04-19
Pages: 6
Assignors
ZUCKER, MARTIN L.
Executed: 2010-03-12
DEVINE, DANIEL J.
Executed: 2010-03-10
LEE, YOUNG JAI
Executed: 2010-03-11
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electrostatic Chuck System and Process for Radially Tuning the Temperature Profile Across the Surface of a Substrate
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →