Patent Assignment
Reel/Frame 024275/0557
Assignment of Assignor's Interest
Recorded: 2010-04-22
Pages: 4
Assignors
ANTONELLI, GEORGE ANDREW
Executed: 2010-03-25
SRIRAM, MANDYAM
Executed: 2010-04-07
RANGARAJAN, VISHWANATHAN
Executed: 2010-04-07
SUBRAMONIUM, PRAMOD
Executed: 2010-04-07
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Depositing Conformal Boron Nitride Film by Cvd Without Plasma