Patent Assignment
Reel/Frame 024283/0557
Assignment of Assignor's Interest
Recorded: 2010-04-24
Pages: 5
Assignors
BEIERL, HELMUT
Executed: 2010-04-21
FELDMANN, HEIKO
Executed: 2010-04-20
HETZLER, JOCHEN
Executed: 2010-03-25
TOTZECK, MICHAEL
Executed: 2010-03-25
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.