Patent Assignment
Reel/Frame 024285/0842
Assignment of Assignor's Interest
Recorded: 2010-04-26
Pages: 8
Assignors
BECKER, VOLKER
Executed: 2010-03-09
LAERMER, FRANZ
Executed: 2010-04-08
FUCHS, TINO
Executed: 2010-03-08
LEINENBACH, CHRISTINA
Executed: 2010-03-09
Assignee
ROBERT BOSCH GMBH
POSTFACH 30 02 20, STUTTGART, DE-70442, GERMANY
Covered Property
(1)
Method for Etching a Layer on a Silicon Semiconductor Substrate