Patent Assignment
Reel/Frame 024314/0051
Assignment of Assignor's Interest
Recorded: 2010-04-29
Pages: 2
Assignor
PLANAR SYSTEMS, INC.
Executed: 2010-01-21
Assignee
BENEQ OY
ENSIMMAINEN SAVU, FI-01510 VANTAA, FINLAND
Covered Property
(1)
Precursor Material Delivery System with Thermal Enhancements for Atomic Layer Deposition
Application:
11/564,276 →
Publication:
US 2007/0089674