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App. No. 11/564,276 · Confirmation No. 2288

PRECURSOR MATERIAL DELIVERY SYSTEM WITH THERMAL ENHANCEMENTS FOR ATOMIC LAYER DEPOSITION

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2011-04-14 ABN Abandonment 2 View
2010-05-26 CTFR Final Rejection 13 View
2010-05-26 892 List of references cited by examiner 1 View
2010-05-26 SRNT Examiner's search strategy and results 9 View
2010-05-26 SRFW Search information including classification, databases and other search related notes 1 View
2010-05-26 1449 List of References cited by applicant and considered by examiner 5 View
2010-05-26 1449 List of References cited by applicant and considered by examiner 3 View
2010-05-26 1449 List of References cited by applicant and considered by examiner 1 View
2010-05-13 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-05-13 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-04-29 PA.. Power of Attorney 3 View
2010-04-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-04-26 CLM Claims 4 View
2010-04-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2010-04-26 WFEE Fee Worksheet (SB06) 1 View
2010-04-26 WFEE Fee Worksheet (SB06) 1 View
2010-04-15 C.AD Change of Address 1 View
2010-03-30 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2010-03-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-03-02 CLM Claims 4 View
2010-03-02 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2010-03-02 XT/ Extension of Time 1 View
2010-03-02 WFEE Fee Worksheet (SB06) 1 View
2009-10-02 CTNF Non-Final Rejection 23 View
2009-10-02 892 List of references cited by examiner 1 View
2009-10-02 1449 List of References cited by applicant and considered by examiner 5 View
2009-10-02 SRNT Examiner's search strategy and results 3 View
2009-10-02 SRFW Search information including classification, databases and other search related notes 1 View
2009-10-02 1449 List of References cited by applicant and considered by examiner 1 View
2009-10-02 1449 List of References cited by applicant and considered by examiner 1 View
2009-07-24 1449 List of References cited by applicant and considered by examiner 1 View
2009-07-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-07-24 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2009-06-18 ELC. Response to Election / Restriction Filed 1 View
2009-06-18 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2009-06-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-05-21 CTRS Requirement for Restriction/Election 6 View
2007-11-05 TRAN.LET Transmittal Letter 3 View
2007-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2007-11-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-04-26 NTC.PUB Notice of Publication 1 View
2007-01-12 APP.FILE.REC Filing Receipt 3 View
2007-01-03 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2007-01-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-11-28 DRW Drawings-only black and white line drawings 9 View
2006-11-28 ADS Application Data Sheet 5 View
2006-11-28 OATH Oath or Declaration filed 5 View
2006-11-28 SPEC Specification 29 View
2006-11-28 CLM Claims 4 View
2006-11-28 ABST Abstract 1 View
2006-11-28 PA.. Power of Attorney 1 View
2006-11-28 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2006-11-28 WFEE Fee Worksheet (SB06) 2 View
2006-11-28 N417 Electronic Filing System Acknowledgment Receipt 3 View
2006-11-28 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/564,276
Filed
2006-11-28
Pub. No.
US20070089674A1
Art Unit
1716