Patent Assignment
Reel/Frame 018561/0073
Assignment of Assignor's Interest
Recorded: 2006-11-29
Received: 2006-11-29
Pages: 6
Assignors
AITCHISON, BRADLEY J.
Executed: 2005-11-01
HARKONEN, KARI
Executed: 2005-11-16
KUOSMANEN, PEKKA
Executed: 2005-11-16
LANG, TEEMU
Executed: 2005-11-16
LESKINEN, HANNU
Executed: 2005-11-16
MAULA, JARMO
Executed: 2005-11-16
TURKULAINEN, TOMMY
Executed: 2005-11-16
SONNINEN, MARTTI
Executed: 2005-11-21
Assignee
PLANAR SYSTEMS, INC.
1195 NW COMPTON DRIVE, BEAVERTON, OR, 97006, UNITED STATES
Covered Properties
(2)
Precursor Material Delivery System with Thermal Enhancements for Atomic Layer Deposition
Application:
11/564,276 →
Precursor Material Delivery System with Staging Volume for Atomic Layer Deposition
Application:
11/564,272 →