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App. No. 11/564,272 · Confirmation No. 2284

PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC LAYER DEPOSITION

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-03-02 CLM Claims 4 View
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2009-03-02 WFEE Fee Worksheet (SB06) 1 View
2008-12-02 CTRS Requirement for Restriction/Election 6 View
2008-09-26 ELC. Response to Election / Restriction Filed 1 View
2008-09-26 CLM Claims 4 View
2008-09-26 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2008-09-26 LET. Miscellaneous Incoming Letter 2 View
2008-09-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-09-26 WFEE Fee Worksheet (SB06) 1 View
2008-07-28 CTRS Requirement for Restriction/Election 6 View
2008-07-28 FWCLM Index of Claims 2 View
2008-07-28 BIB Bibliographic Data Sheet 1 View
2007-11-07 TRAN.LET Transmittal Letter 3 View
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2007-05-24 NTC.PUB Notice of Publication 1 View
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2007-02-07 PEFR Applicant Response to Pre-Exam Formalities Notice 2 View
2007-02-07 A.PE Preliminary Amendment 1 View
2007-02-07 CLM Claims 5 View
2007-02-07 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-02-07 WFEE Fee Worksheet (SB06) 2 View
2007-02-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-02-07 WFEE Fee Worksheet (SB06) 1 View
2007-01-23 APP.FILE.REC Filing Receipt 3 View
2007-01-23 PEFN Pre-Exam Formalities Notice 2 View
2007-01-03 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2007-01-03 FOR Foreign Reference 12 View
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2006-11-28 DRW Drawings-only black and white line drawings 9 View
2006-11-28 OATH Oath or Declaration filed 5 View
2006-11-28 ADS Application Data Sheet 5 View
2006-11-28 SPEC Specification 29 View
2006-11-28 CLM Claims 5 View
2006-11-28 ABST Abstract 1 View
2006-11-28 PA.. Power of Attorney 1 View
2006-11-28 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2006-11-28 WFEE Fee Worksheet (SB06) 2 View
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2006-11-28 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/564,272
Filed
2006-11-28
Pub. No.
US20070117383A1
Art Unit
1792