IP Library › Patent Application 60410067
Patent Application Provisional
App. No. 60/410,067 · Confirmation No. 1709

Precursor material delivery system for atomic layer deposition

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-09-11 TRNA Transmittal of New Application 3 View
2002-09-11 SPEC Specification 35 View
2002-09-11 DRW Drawings-only black and white line drawings 9 View
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Quick Facts
App. No.
60/410,067
Filed
2002-09-11