Patent Assignment
Reel/Frame 024315/0439
Assignment of Assignor's Interest
Recorded: 2010-04-30
Pages: 5
Assignors
LU, CHI-TA
Executed: 2010-04-22
CHEN, PENG-REN
Executed: 2010-04-22
CHENG, DONG-HSU
Executed: 2010-04-22
HSIEH, CHANG-JYH
Executed: 2010-04-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Lithography Performance Check Methods and Apparatus