Patent Assignment
Reel/Frame 024315/0932
Assignment of Assignor's Interest
Recorded: 2010-04-30
Pages: 4
Assignor
HAYASHI, DAISUKE
Executed: 2010-04-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Flow Path Structure and Substrate Processing Apparatus