Patent Assignment
Reel/Frame 024335/0724
Assignment of Assignor's Interest
Recorded: 2010-05-05
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Throughput Enhancement for Scanned Beam Ion Implanters
Application:
12/774,037 →
Publication:
US 2011/0272567
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.