Patent Assignment
Reel/Frame 024346/0184
Assignment of Assignor's Interest
Recorded: 2010-05-06
Pages: 5
Assignors
KUGLER, JENS
Executed: 2010-02-26
WEBER, ULRICH
Executed: 2010-03-01
SCHAFFER, DIRK
Executed: 2010-02-26
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element Module with Minimized Parasitic Loads
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.