Patent Assignment
Reel/Frame 024348/0865
Assignment of Assignor's Interest
Recorded: 2010-05-06
Pages: 4
Assignors
KOSHIMIZU, CHISHIO
Executed: 2010-02-17
YAMAWAKU, JUN
Executed: 2010-02-17
MATSUDO, TATSUO
Executed: 2010-02-17
SAITO, MASASHI
Executed: 2010-02-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Focus Ring Heating Method, Plasma Etching Apparatus, and Plasma Etching Method