Patent Assignment
Reel/Frame 024359/0207
Assignment of Assignor's Interest
Recorded: 2010-05-10
Pages: 7
Assignors
STONE, DALE
Executed: 2010-05-07
STONE, LYUDMILA
Executed: 2010-05-07
PETRY, KLAUS
Executed: 2010-05-07
SUURONEN, DAVID E.
Executed: 2010-05-07
BLAKE, JULIAN G.
Executed: 2010-05-07
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Removal of Charge Between a Substrate and an Electrostatic Clamp