Assignment of Assignor's Interest

Recorded: 2010-05-10 Pages: 2

Assignors

RATH, MARTIN

Executed: 2010-04-23

MUELLER, ULRICH

Executed: 2010-04-25

MIELKE, WALDEMAR

Executed: 2010-04-26

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method for Arranging an Optical Module in a Measuring Apparatus and a Measuring Apparatus

Patent: 8,400,618 →

Application: 12/706,560 →

Publication: US 2010/0208230

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.