Patent Assignment
Reel/Frame 024359/0982
Assignment of Assignor's Interest
Recorded: 2010-05-10
Pages: 2
Assignor
ARNZ, MICHAEL
Executed: 2010-02-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Measuring Scattered Light on an Optical System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.