Patent Assignment
Reel/Frame 024368/0600
Assignment of Assignor's Interest
Recorded: 2010-05-11
Pages: 3
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Site Based Quantification of Substrate Topography and Its Relation to Lithography Defocus and Overlay