Patent Assignment
Reel/Frame 024416/0490
Assignment of Assignor's Interest
Recorded: 2010-05-20
Pages: 3
Assignor
TAKAGI, TOSHIO
Executed: 2010-04-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Film Deposition Apparatus and Film Deposition Method