Patent Assignment
Reel/Frame 024435/0417
Assignment of Assignor's Interest
Recorded: 2010-05-25
Pages: 3
Assignors
KUGIMOTO, HIRONORI
Executed: 2010-04-06
ANDO, KAZUTO
Executed: 2010-04-06
MORIYA, YOSHIAKI
Executed: 2010-04-06
Assignee
SUMITOMO OSAKA CEMENT CO., LTD.
6-28, ROKUBANCHO, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Electrostatic Chuck, Production Method of Electrostatic Chuck and Electrostatic Chuck Device