Patent Assignment
Reel/Frame 024439/0849
Assignment of Assignor's Interest
Recorded: 2010-05-26
Pages: 3
Assignors
CHENG, YU-HUNG
Executed: 2010-05-12
LI, CHII-HORNG
Executed: 2010-05-13
LEE, TZE-LIANG
Executed: 2010-05-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Selective Etching in the Formation of Epitaxy Regions in MOS Devices