Assignment of Assignor's Interest

Recorded: 2010-05-27 Pages: 4

Assignors

DODOC, AURELIAN

Executed: 2010-05-20

BLEIDISTEL, SASCHA

Executed: 2010-04-09

CONRADI, OLAF

Executed: 2010-04-12

KAZI, ARIF

Executed: 2010-04-01

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Microlithographic Projection Exposure Apparatus with Correction Optical System That Heats Projection Objective Element

Patent: 8,773,638 →

Application: 12/727,482 →

Publication: US 2010/0231883

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.