Patent Assignment
Reel/Frame 024469/0088
Assignment of Assignor's Interest
Recorded: 2010-06-02
Pages: 4
Assignor
KOSHIMIZU, CHISHIO
Executed: 2010-05-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method