Patent Assignment
Reel/Frame 024484/0811
Assignment of Assignor's Interest
Recorded: 2010-06-04
Pages: 4
Assignor
HAYASHI, DAISUKE
Executed: 2010-05-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus