Patent Assignment
Reel/Frame 024507/0809
Assignment of Assignor's Interest
Recorded: 2010-06-09
Pages: 5
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
MEIKO CO., LTD.
732, SHIMOIMAI, KAI-SHI, YAMANASHI, 400-0105, JAPAN
Covered Property
(1)
Plasma Processing Apparatus