Patent Assignment
Reel/Frame 024511/0711
Assignment of Assignor's Interest
Recorded: 2010-06-09
Pages: 6
Assignees
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, 107-6325, JAPAN
Covered Property
(1)
Determination of Material Optical Properties for Optical Metrology of Structures
Application:
12/775,392 →
Publication:
US 2011/0276319
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.