Patent Assignment
Reel/Frame 024524/0037
Assignment of Assignor's Interest
Recorded: 2010-06-11
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.