Patent Assignment
Reel/Frame 024533/0452
Assignment of Assignor's Interest
Recorded: 2010-06-14
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Inductively Coupled Plasma Reactor Having Rf Phase Control and Methods of Use Thereof