Patent Assignment
Reel/Frame 024533/0476
Assignment of Assignor's Interest
Recorded: 2010-06-14
Pages: 4
Assignors
GRIMBERGEN, MICHAEL N.
Executed: 2010-03-09
OUYE, ALAN HIROSHI
Executed: 2010-03-09
TODOROW, VALENTIN N.
Executed: 2010-04-08
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Inductively Coupled Plasma Reactor Having Rf Phase Control and Methods of Use Thereof