Patent Assignment
Reel/Frame 024561/0224
Assignment of Assignor's Interest
Recorded: 2010-06-18
Pages: 4
Assignors
LU, CHEN-FA
Executed: 2010-05-10
LIU, CHUNG-SHI
Executed: 2010-05-10
YU, CHEN-HUA
Executed: 2010-05-10
CHEN, WEI-YU
Executed: 2010-05-10
CHEN, CHENG-TING
Executed: 2010-05-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Plasma Treatment for Semiconductor Devices