Patent Assignment
Reel/Frame 024564/0664
Assignment of Assignor's Interest
Recorded: 2010-06-21
Pages: 9
Assignors
CHOI, DONGSUB
Executed: 2010-06-01
WIDMANN, AMIR
Executed: 2010-06-18
SAIDIN, ZAIN
Executed: 2010-05-25
LASKE, FRANK
Executed: 2010-06-16
ROBINSON, JOHN
Executed: 2010-05-27
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Unique Mark and Method to Determine Critical Dimension Uniformity and Registration of Reticles Combined with Wafer Overlay Capability