Patent Assignment
Reel/Frame 024568/0004
Assignment of Assignor's Interest
Recorded: 2010-06-21
Pages: 2
Assignor
WANG, SHIANG-BAU
Executed: 2010-06-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Post Cmp Planarization by Cluster Ion Beam Etch