Patent Assignment
Reel/Frame 024570/0864
Assignment of Assignor's Interest
Recorded: 2010-06-22
Pages: 4
Assignors
ENDRES, MARTIN
Executed: 2010-06-11
STUETZLE, RALF
Executed: 2010-06-10
OSSMANN, JENS
Executed: 2010-06-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Optics for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.