Patent Assignment
Reel/Frame 024571/0466
Assignment of Assignor's Interest
Recorded: 2010-06-22
Pages: 3
Assignor
ARNZ, MICHAEL
Executed: 2010-06-11
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, D-07745, GERMANY
Covered Property
(1)
Method and Device for Determining the Position of an Edge of a Marker Structure with Subpixel Accuracy in an Image, Having a Plurality of Pixels, of the Marker Structure
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.