Patent Assignment
Reel/Frame 024602/0482
Assignment of Assignor's Interest
Recorded: 2010-06-28
Pages: 4
Assignors
TOSHIMA, TAKAYUKI
Executed: 2010-06-28
TERADA, KAZUO
Executed: 2010-06-28
HONDA, KAZUYUKI
Executed: 2010-06-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method