Patent Assignment
Reel/Frame 024612/0238
Assignment of Assignor's Interest
Recorded: 2010-06-29
Pages: 5
Assignors
WATANABE, YUKIO
Executed: 2010-05-28
WAKABAYASHI, OSAMU
Executed: 2010-05-28
IGARASHI, MIWA
Executed: 2010-06-01
Assignee
GIGAPHOTON INC.
2-6-1 OTEMACHI, CHIYODA-KU, TOKYO, 100-0004, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Source Apparatus