Patent Assignment
Reel/Frame 024620/0834
Assignment of Assignor's Interest
Recorded: 2010-06-30
Pages: 3
Assignors
KELLOGG, MICHAEL C.
Executed: 2010-06-30
MARAKHTANOV, ALEXEI
Executed: 2010-06-30
DHINDSA, RAJINDER
Executed: 2010-06-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Movable Ground Ring for a Plasma Processing Chamber