Patent Assignment
Reel/Frame 024623/0416
Assignment of Assignor's Interest
Recorded: 2010-07-01
Pages: 4
Assignors
OIKAWA, YOSHIAKI
Executed: 2010-06-15
OKAZAKI, KENICHI
Executed: 2010-06-11
MARUYAMA, HOTAKA
Executed: 2010-06-11
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device