Patent Assignment
Reel/Frame 024629/0970
Assignment of Assignor's Interest
Recorded: 2010-07-02
Pages: 5
Assignors
MANN, HANS-JUERGEN
Executed: 2010-05-20
ULRICH, WILHELM
Executed: 2010-06-30
MUELLENDER, STEPHAN
Executed: 2010-06-08
ENKISCH, HARTMUT
Executed: 2010-05-26
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Imaging Optical System and Projection Exposure System Including the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.