Patent Assignment
Reel/Frame 024643/0355
Assignment of Assignor's Interest
Recorded: 2010-07-07
Pages: 6
Assignors
SCHUBERT, ERICH
Executed: 2010-06-18
KOHL, ALEXANDER
Executed: 2010-06-24
ZIEGLER, GERHARD-WILHELM
Executed: 2010-06-23
PATRA, MICHAEL
Executed: 2010-06-21
DEGUENTHER, MARKUS
Executed: 2010-06-29
LAYH, MICHAEL
Executed: 2010-06-18
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System for Illuminating a Mask in a Microlithographic Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.